Re: Missing term

[Larry Woolf <larry.woolf@GAT.COM>]

> -----Original Message-----
> From: Dan Crowe
> Sent: Wednesday, August 27, 2003 9:58 AM
> Subject: Re: Missing term
>
> "Epitaxy" is another word associated with phase transitions from gas =
> to solid; however, liquid-phase epitaxy is a transition from a liquid=
>  to a solid.  I think that the appropriate phrase is "vapor-phase epi=
> taxy".  Specific epitaxial processes are called "molecular-beam epita=
> xy", "chemical-beam epitaxy", and similar phrases with additional mod=
> ifiers.  Epitaxy implies a finely-controlled chemical composition of =
> the solid formed; sublimation from a gas to a solid does not necessar=
> ily imply a precise chemical composition.  Epitaxy also implies the f=
> ormation of a thin layer; sublimation from a gas to a solid could for=
> m a thicker solid.

Not exactly. Epitaxy is defined as the oriented overgrowth of film material
and typically refers to the growth of single crystal films on single crystal
substrates.  There are two classes of epitaxial growth. Homoepitaxy is the
epitaxial growth of a deposit on a substrate of the same material, such as
doped Si epitaxially grown on a Si wafer.  Heteroepitaxy is the epitaxial
growth of a deposit on a substrate of a different material, such as single
crystal GaAs grown on a single crystal Si wafer.  There are many ways of
achieving epitaxial growth, such as by sputtering, CVD, liquid phase, etc.
See:
<http://britneyspears.ac/physics/fabrication/fabrication.htm>
or, for a more mundane source
Handbook of Physical Vapor Deposition Processing by Donald Mattox, pages
486-487.

Larry Woolf
General Atomics
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